[9p-N202-1~17] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[9p-N202-1] [The 58th Young Scientist Presentation Award Speech] III-V membrane MOSCAP microring optical modulator

〇Hiroya Sakumoto¹, Tipat Piyapatarakul¹, Kasidit Toprasertpong¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.The Univ. of Tokyo)

Keywords:

III-V membrane waveguide,Optical phase modulator,PICs

We have been developing a MOSCAP-type optical phase shifter with a metal electrode on a III-V semiconductor membrane waveguide. Due to the large refractive index change and low free-carrier absorption induced by electrons in the III-V semiconductor, a phase shift comparable to that of Si depletion-type phase shifters can be achieved with low optical loss, even when using a thick gate insulator. Furthermore, high-speed operation is expected due to its small parasitic capacitance. To date, we have confirmed a phase-modulation efficiency of 0.89 V·cm and a clear eye opening at 32 Gbps.