[9p-N202-1~17] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[9p-N202-2] Electro-optic polymer modulator based on thin-film silicon core

〇Hiromu Sato¹, Shiyoshi Yokoyama¹ (1.Kyushu Univ.)

Keywords:

optical modulator,electro-optic polymer

We developed a hybrid optical modulator using a thin-film silicon core and electro-optic polymer on an n-type doped SOI substrate. By utilizing the doped silicon as a bottom electrode, we achieved a reduced electrode spacing of 2 μm, less than one-third of conventional designs. The fabricated device demonstrated a half-wave voltage of 4.2 V and a voltage-length product (V_πL) of 0.84 V·cm.