[9p-N202-1~17] 3.13 Silicon photonics, Photonics-electronics convergence, Optical control

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[9p-N202-7] Non-Volatile Phase Shift Using Silicon Nitride Waveguide-Based Mach-Zehnder Interferometer

〇Yuriko Maegami¹, Guangwei Cong¹, Rai Kou¹, Noritsugu Yamamoto¹, Toshihiro Narushima¹, Tai Tsuchizawa¹, Hitoshi Kawashima¹, Koji Yamada¹ (1.AIST)

Keywords:

silicon nitride,non-volatile phase shift

We fabricate an asymmetric Mach-Zehnder interferometer using PECVD-SiN waveguides, which are highly compatible with CMOS processes, and demonstrate non-volatile phase shift in the telecommunication band by using refractive index changes induced by charge state modulation of dangling bonds in the SiN through UV irradiation and local heating with integrated micro-heaters.