Presentation Information
[9p-N401-1]Nanostructure control of glass surfaces via atmospheric-pressure plasma etching and fabrication of superhydrophobic glass
〇(D)Nobuya Mineyuki1,2, Kohei Yasuda2, Yasuo Hayashi2, Seiichiro Higashi1 (1.Hiroshima Univ., 2.AGC.)
Keywords:
atmospheric pressure plasma,microfabrication,superhydrophobic
Rain and dirt on the cover glasses of sensors and cameras in autonomous driving systems pose significant challenges. As a result, the demand for superhydrophobic glass is rapidly increasing. Conventional methods, such as wet etching and vacuum plasma techniques, face issues like environmental impact and substrate size limitations. This study proposes a novel approach to achieve superhydrophobicity more efficiently by monitoring surface conditions during atmospheric pressure CF4 plasma etching and controlling the reaction process.