[9p-N401-1~15] CS.9 Code-sharing session of 6.5&7.5

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[9p-N401-1] Nanostructure control of glass surfaces via atmospheric-pressure plasma etching and fabrication of superhydrophobic glass

〇(D)Nobuya Mineyuki^1,2, Kohei Yasuda², Yasuo Hayashi², Seiichiro Higashi¹ (1.Hiroshima Univ., 2.AGC.)

Keywords:

atmospheric pressure plasma,microfabrication,superhydrophobic

Rain and dirt on the cover glasses of sensors and cameras in autonomous driving systems pose significant challenges. As a result, the demand for superhydrophobic glass is rapidly increasing. Conventional methods, such as wet etching and vacuum plasma techniques, face issues like environmental impact and substrate size limitations. This study proposes a novel approach to achieve superhydrophobicity more efficiently by monitoring surface conditions during atmospheric pressure CF₄ plasma etching and controlling the reaction process.