[9p-N401-1~15] CS.9 Code-sharing session of 6.5&7.5

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[9p-N401-5] Formation of Single-Crystalline NiSi₂-On-Insulator Through Rapid Thermal Annealing of Ultrathin a-Si/Ni/SOI Stacked Structures

〇Yuki Imai¹, Shun Tanida¹, Yuji Yamamoto^2,1, Noriyuki Taoka³, Katsunori Makihara^1,2 (1.Nagoya Univ., 2.IHP, 3.Aichi Inst. Tech.)

Keywords:

silicide,single-crystalline,SOI