Presentation Information
[9p-N402-5]Observation of anisotropic surface texture by pupil-segmented polarization imaging
〇Norimasa Tsutsui1,2, Keisuke Yoshiki1, Hiroshi Ikenoue1 (1.D-Future, Research Institute, Kochi Univ. of Tech., 2.Denken Co.,Ltd.)
Keywords:
Polarization by Split Pupil Technology (PSPT),Polarization Mode Converter,Nano Machine Vision
We realized multi-mode observation that flexibly varies the sensitivity to anisotropic surface texture on sample surfaces using a pupil-segmented polarization imaging device with ECB liquid crystal elements. By individually controlling the birefringence phase difference of each segment of the multi-segment ECB liquid crystal element mounted on a coaxial illumination camera through voltage application, we can switch pupil segmentation patterns and impart anisotropy to the sensitivity. In experiments, we successfully suppressed the sensitivity to uniform directional machining marks on metal surfaces and extracted scratches formed in specific orientations after manufacturing.