[9p-N403-1~16] 7.2 Applications and technologies of electron beams

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[9p-N403-15] Charge-reduced SEM imaging by modulating e-beam from an NEA-InGaN semiconductor photocathode

〇Mitsunobu Yasuda¹, Tomohiro Nishitani^2,3, Atsushi Koizumi², Yuta Arakawa², Kohtaro Niimi², Daiki Sato^2,3, Sumihisa Ishikawa¹, Yuji Otsuka¹ (1.Toray Research Centre, 2.Photo electron soul, 3.Nagoya Univ.)

Keywords:

photocathode,electron gun,InGaN