[9p-N403-1~16] 7.2 Applications and technologies of electron beams

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[9p-N403-2] Effect of TiN deposition conditions on the emission characteristics of TiN-coated field emitter arrays

〇Hiromasa Murata¹, Tomoaki Osumi^1,2, Yasuhito Gotoh², Katsuhisa Murakami¹, Masayoshi Nagao¹ (1.AIST, 2.Kyoto Univ.)

Keywords:

field emitter array,TiN