[9p-N403-1~16] 7.2 Applications and technologies of electron beams

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[9p-N403-3] Improvement in the number of active tips after reheating in TiN coated volcano-structured field emitter array

〇Yusuke Kawasaki¹, Hidekazu Murata¹, Hiromasa Murata², Masayoshi Nagao² (1.Meijo Univ., 2.AIST)

Keywords:

field emitter array,electron optical instrument for evaluation of multi emitters,TiN coating

At the previous meeting of the Japan Society of Applied Physics, we reported on changes in the emission current values of individual tips before and after aging (long-time DC drive) and thermal treatment, using a volcano-structured field emitter array (FEA) with TiN coating applied to Si emitters by reactive sputtering. It has been observed that, during operation, the total emission current gradually decreases over time, but can be restored to a level close to the initial performance through reheating. In this presentation, we report our observations regarding the improvement in the number of active tips after reheating.