Presentation Information
[9p-N403-5]Electron emission measurement of a LaB6 cathode in Schottky mode
〇Takaharu Ito1, Hidekazu Murata1, Takayuki Tanaka1, Eiji Rokuta1 (1.Meijo Univ.)
Keywords:
LaB6,Schottky electron emission,Work function
To improve the performance of next-generation electron beam lithography equipment, a high-performance electron source is essential. Achieving this requires the development of an electron gun that meets the conditions of high brightness, high current, high stability, and long lifespan. For long-term operation, lowering the operating temperature is necessary; however, this results in a decrease in brightness. Until now, we have been evaluating thermionic emission at low heating temperatures. This time, in order to compensate for the reduced brightness, we conducted an evaluation of LaB6 emitters in the Schottky mode, and we report the findings.