Presentation Information
[9p-N403-9]Factors causing decreased accuracy in measuring the virtual source size of an electric field emission electron source
〇Erina Kawamoto1, Soichiro Matsunaga1,2 (1.Hitachi, Ltd., 2.Hitachi High-Tech.)
Keywords:
electron source,electron microscope,eelctron source
In this presentation, we propose a high-precision method for measuring the electron source diameter using a technique that enlarges and projects the virtual electron source of a field emission electron source mounted on a scanning electron microscope (SEM) onto a sample.In this method, the electron source diameter is obtained by dividing the beam diameter of the enlarged projection by the magnification factor. The authors have previously proposed a method to verify the measurement accuracy and evaluated the accuracy of the magnification factor, which is the primary cause of accuracy degradation. In this study, we evaluated the effects of astigmatism and vibration, which are other causes of measurement accuracy degradation.