Presentation Information
[9p-N405-12]Analysis of Plume Images in the Thin Film Formation Process
〇(B)Syoya Nakao1, Hachiya Tatsuma1, Horio Keiichi1,5, Ichino Yusuke3,5, Ichinose Ataru4,5, Horide Tomoya2,5, Matsumoto Kaname2,5, Yoshida Yutaka2,5 (1.Kyusyu Inst. of Technol., 2.Nagoya Univ., 3.Aichi Inst. of Technol., 4.CRIEPI, 5.JST-CREST)
Keywords:
Machine Learning,plume,LightGBM
We performed an analysis of plume images in the thin film formation process. The objective was to extract features related to the color information of the plume under different materials used for formation, oxygen partial pressures, and laser intensities. In this study, we employed LightGBM for a classification task and aimed to extract features for each condition by examining the model’s prediction process.