Presentation Information
[9p-N405-9]Deposition of c-axis oriented YBa2Cu3O7-x thin films on Si substrates using self-aligned LaNiO3 (3)
〇(M1C)Tasuku Mita1, Nakamura Kyousuke1, Shimamura Kazutoshi1, Kwahara Masami2, Nagao Masanori3, Kawae Takeshi1 (1.Kanazawa Univ., 2.Kojundo Chemical Lab. Co., ltd., 3.Yamanashi Univ.)
Keywords:
superconductivity,YBCO
With the aim of improving the flexibility of substrate materials for depositing YBa2Cu3O7-xthin films, we are attempting to fabricate YBCO thin films on Si substrates using LaNiO3 thin films, which exhibit self-aligned growth, as template layers. In this study, we focused on the possibility that Ni diffusion from the LNO layer may degrade the crystallinity and superconducting properties of the YBCO layer. To suppress Ni diffusion, we introduced a new SrRuO3 buffer layer to form a YBCO/SRO/LNO/Si substrate multilayer structure and evaluated its crystallinity and superconducting properties.