[9p-N406-1~13] 1.6 Ultrasonics

1:00 PM - 1:15 PM JST(4:00 AM - 4:15 AM UTC)

[9p-N406-1] Evaluation of Acoustic Reflective Multilayer Film of SMR Type Acoustic Wave Device

〇Yuji Ohashi¹, Jun-ichi Kushibiki², Kentaro Totsu², Masashi Suzuki³, Shoji Kakio³, Shota Jin⁴, Kazuki Yokoo⁴, Takahiro Ito⁴ (1.Akita Pref. Univ., 2.Tohoku Univ., 3.Yamanashi Univ., 4.Geomatec)

Keywords:

SMR Type Acoustic Wave Filter,Acoustic Reflective Multilayer Film

We fabricated SiO₂/Ta₂O₅ and SiO₂/Al₂O₃ multilayers for acoustic reflection in SMR devices and evaluated them based on their resonance characteristics. As a result, we found that the Al₂O₃/SiO₂ multilayer has a large admittance ratio and Q value, and also has excellent temperature characteristics, raising the possibility of constructing a higher performance SMR.