Presentation Information
[9p-P08-17]Development of a two-dimensional hydrogen elemental composition imagingby micro-ERDA system using ion microbeams
〇Takeaki Goto1, Kyoka Maruta1, Misako Miwa1, Sho Toyama1, Wataru Kada1, Shigeo Matsuyama1 (1.Tohoku Univ.)
Keywords:
Elastic Recoil Detection Analysis,hydrogen analysis,depth of focus
We have developed a micro-ERDA system aimed at visualizing the three-dimensional elemental distribution of hydrogen. While ERDA is effective for hydrogen analysis, its spatial resolution deteriorates due to the inclined configuration of the sample. In this study, we addressed this issue by optimizing the focal depth, and successfully obtained uniform hydrogen distribution images in experiments using model samples. This presentation reports an overview of the developed micro-ERDA system and the analytical results obtained from multiple model samples.