[9p-P09-1~17] 8.1 Plasma production and diagnostics

[9p-P09-12] Energy-resolved time-evolution measurement using
time-of-flight mass spectrometry in the deposition region of
deep oscillation magnetron sputtering

〇(M2)Hiroki Kobayashi¹, Yuki Nakagawa¹, Eisuke Yokoyama^1,2, Nobuo Nishimiya¹, Masaomi Sanekata¹, Masahide Tona³, Hiroaki Yamamoto³, Keizo Tsukamoto³, Kiyokazu Fuke⁴, Keijiro Ohshimo⁵, Fuminori Misaizu⁶ (1.Tokyo Polytech Univ., 2.Salesian Polytech., 3.Ayabo Corp., 4.Kobe Univ., 5.Hokkaido Univ. of Edu., 6.Tohoku Univ.)

Keywords:

Time-of-flight mass spectrometer,Magnetron supperring,Energy distribution function

Recently, high-power impulse magnetron sputtering (HiPIMS) has been attracting attention as a high-quality film deposition technology. In particular, multi-pulse HiPIMS (m-HiPIMS) is a method that achieves high power density with a few pulses and exhibits excellent ionization rates and film characteristics. On the other hand, although deep oscillation magnetron sputtering (DOMS) is driven with lower power density compared to m-HiPIMS, it can be driven by dozens of pulses that can reach milliseconds and can maintain stable plasma over an extended period. Therefore, DOMS is also expected to be a sputtering film deposition method with excellent arc-free characteristics. In our laboratory, simultaneous multi-component time-evolution measurements using a time-of-flight mass spectrometer have been performed in DOMS. In this study, an energy-resolved time evolution measurement performed with kinetic energy filtering for ions by retarding potentials using a time-of-flight mass spectrometer was attempted in DOMS. The splitting and loss of peaks corresponding to the retarding potential were observed in the time evolution measurement of Ar ions. This suggests that the peak splitting and loss is due to the difference of kinetic energy of the ions. In presentation, we will report the results of time-resolved energy measurements at each peak time for each ion species.