The 86th JSAP Autumn Meeting 2025
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Poster presentation8 Plasma Electronics : 8.1 Plasma production and diagnostics

[9p-P09-1~17]8.1 Plasma production and diagnostics

Tue. Sep 9, 2025 4:00 PM - 6:00 PM JST
Tue. Sep 9, 2025 7:00 AM - 9:00 AM UTC
P09 (Gymnasium)

[9p-P09-1]Effect of External Electric Field Application on Gas Flow Behavior and Optical Emission Propagation in an Atmospheric Pressure Plasma Jet

〇HIROMASA YAMADA1 (1.NIT, Nagano College)

[9p-P09-2]Reduction of Chemical Reaction Networks in Atmospheric-Pressure Low-Temperature Plasma via Directed Hypergraph Spectral Sparsification

〇Kaito Nishi1, Naoki Higashi1, Satoshi Tomioka1 (1.Hokkaido Univ.)

[9p-P09-3]Fine Structure in Standing Striations Formed in the Outer Region of DC Glow Discharges: Current-Voltage Characteristics

〇Kenji Furuya1,2 (1.Kyushu Univ., 2.IGSES Kyushu Univ.)

[9p-P09-4]Fine Structure of Standing Striations Formed in the Outer Region of DC Glow Discharges: Observation through Fine Particles and Shape Control

〇Shoki Sakai1, Kenji Furuya1,2 (1.IGSES Kyushu Univ., 2.Kyushu Univ.)

[9p-P09-5]Investigation of magnet arrangement and magnetic field distribution for unbalanced RF magnetron plasma production

〇(M1)Tomoya Mihara1, Yasunori Ohtsu1 (1.Saga Univ.)

[9p-P09-6]Generation of High-Density RF Magnetized Hollow Plasma under Low-Pressure Hydrogen Gas

〇(M1)Naohisa Goto1, Ohtsu Yasunori1 (1.Saga Univ.)

[9p-P09-7]Influence of gas pressure on a high-density RF hydrogen plasma production using a hybrid hollow electrode and magnets

〇Kengo Tazume1, Yasunori Ohtsu1 (1.Saga Univ.)

[9p-P09-8]Development of multi-hollow magnetized RF sputtering plasma using cylindrical AZO target

〇Minoru Yamagata1, Yasunori Ohtsu1 (1.Saga Univ)

[9p-P09-9]Production of rotational magnetron RF sputtering plasma for improving target utilization

〇(M1)Masato Komori1, Otsu Yasunori1 (1.Saga Univ)

[9p-P09-10]Development of rotational multi-magnetron RF sputtering system to improve material utilization efficiency

〇Himeko Umeda1, Yasunori Ohtsu1 (1.Saga Univ.)

[9p-P09-11]Analysis of ionization ratio of sputtered Ti particles in deep oscillation magnetron sputtering plasma using optical emission spectroscopy

〇Eisuke Yokoyama1,2, Yuki Nakagawa2, Hiroki Kobayashi2, Nobuo Nishimiya2, Masaomi Sanekata2, Masahide Tona3, Hiroaki Yamamoto3, Keizo Tsukamoto3, Kiyokazu Fuke4, Keijiro Ohshimo5, Fuminori Misaizu6 (1.Salesian Polytech., 2.Tokyo Polytech. Univ., 3.Ayabo Corp., 4.Kobe Univ., 5.Hokkaido Univ. of Edu., 6.Tohoku Univ.)

[9p-P09-12]Energy-resolved time-evolution measurement using
time-of-flight mass spectrometry in the deposition region of
deep oscillation magnetron sputtering

〇(M2)Hiroki Kobayashi1, Yuki Nakagawa1, Eisuke Yokoyama1,2, Nobuo Nishimiya1, Masaomi Sanekata1, Masahide Tona3, Hiroaki Yamamoto3, Keizo Tsukamoto3, Kiyokazu Fuke4, Keijiro Ohshimo5, Fuminori Misaizu6 (1.Tokyo Polytech Univ., 2.Salesian Polytech., 3.Ayabo Corp., 4.Kobe Univ., 5.Hokkaido Univ. of Edu., 6.Tohoku Univ.)

[9p-P09-13]Three-Dimensional Reconstruction of Plasma Emission and Sheath Structure Using Multi-Directional Imaging

〇Haruka Suzuki1,2, Ryota Izumi1, Hayato Yoshikawa1, Hirotaka Toyoda1,2,3 (1.Nagoya Univ., 2.cLPS, Nagoya Univ., 3.NIFS)

[9p-P09-14]Possibility of Electron Temperature Measurement with Curling Probe.

〇Yusei Tajima1, Shun Ando1, Kanata Komatsu1, Keiji Nakamura1, Daisuke Ogawa1 (1.Chubu Univ.)

[9p-P09-15]Measurement of spatial distribution of B atoms in inductively coupled BF3 plasma

〇Hayato Sato1, Kai Takemura1, Keigo Takeda1 (1.Meijo Univ.)

[9p-P09-16]Measurement of Boron Atom Density in Inductively Coupled BF3-Ar Plasma with Absorption Spectroscopy

〇(M1C)Kai Takemura1, Hayato Sato1, Keigo Takeda1 (1.Meijo Univ.)

[9p-P09-17]Measurement of the surface distribution of oxygen atoms above a substrate irradiated by low pressure inductively coupled plasma

〇(M2)Shohei Nanya1, Keigo Takeda1 (1.Meijo Univ.)
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