[9p-S101-1~13] [Open Symposium] Attention Job Seeking Students! Next-Gen Minds: At the Cutting Edge of the Semiconductor Industry

1:55 PM - 2:05 PM JST(4:55 AM - 5:05 AM UTC)

[9p-S101-4] Finding delight in the challenges to face the leading-edge deposition technology

〇Yusuke Terui¹ (1.KOKUSAI ELECTRIC Corp.)

Keywords:

deposition,batch deposition equipment,treatment