Presentation Information

[15a-K306-11]Sterilization Effects of Irradiation Conditions by Deep UV Pulse Laser Light

〇Tatsuro Kagawa1, Kazuhiro Dainaka1, Daisuke Matsui1, Hideharu Horikosi2, Nobuhiro Umemura1 (1.Chitose Inst., 2.TOSOH SGM Corp.)

Keywords:

Laser,Deep Ultraviolet


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