[15p-K103-1~12] (Open Symposium) Attention Job Seeking Students! You Can Drive Semiconductor Innovation - Shape the Future with Your Creativity

3:35 PM - 3:45 PM JST(6:35 AM - 6:45 AM UTC)

[15p-K103-10] The Challenge of Establishing Inspection Technology for Special Wafers for Power Semiconductors

〇Tatsuya Ochi¹ (1.Toray Engineering Co.,Ltd.)

Keywords:

Wafer Inspection System,Power Semiconductors