[15p-K103-1~12] (Open Symposium) Attention Job Seeking Students! You Can Drive Semiconductor Innovation - Shape the Future with Your Creativity

2:35 PM - 2:45 PM JST(5:35 AM - 5:45 AM UTC)

[15p-K103-4] The wonders of developing wafer feeder technology that supports semiconductor lithography equipment

〇Shun Toda¹ (1.CANON INC.)

Keywords:

semiconductor equipmrnt,wafer feeder module