[17a-K209-1~8] 1.5 Instrumentation, measurement and Metrology

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[17a-K209-8] A Study on Humidity Measurement Method based on Condensation with Heat Pipe

〇Naoya Ishiwata¹, Hisashi Abe¹ (1.AIST)

Keywords:

humidity,heat pipe,temperature

Environmental tests are used in various industries, including the semiconductor industry, and high-temperature and high-humidity conditions are often adopted for these tests. Humidity measurement instruments introduced in test chambers for environmental tests have issues such as frequent maintenances and deterioration due to harsh environments. Therefore, development of a maintenance-free humidity-measurement method robust to high-temperature and high-humidity conditions are required. To fulfill this requirement, a novel humidity-measurement method based on condensation with a heat pipe, a part of which was inserted in an atmosphere to be measured, has been developed. However, there remains challenges such as reproducibility and influence of ambient temperature. In this study, we developed a new instrument with a precise temperature control unit to improve reliability of the method and evaluated its performance. Temperature stability of its heat pipe inside a test chamber were approximately 3 times higher than that of an instrument developed previously.