Presentation Information

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-A21-9]Investigation of high temperature and atmospheric pressure activation of Mg ion-implanted GaN using OVPE method

〇Sogo Yokoi¹, Shigeyoshi Usami¹, Masayuki Imanishi¹, Tomoaki Sumi², Junichi Takino², Yoshio Okayama², Masafumi Yokoyama³, Masahiko Hata⁴, Atsushi Tanaka⁵, Yoshio Honda⁵, Hiroshi Amano⁵, Mihoko Maruyama¹, Masashi Yoshimura⁶, Yusuke Mori¹ (1.Grad. Sch. of Eng., Osaka Univ., 2.Panasonic Holdings Corp., 3.Sumitomo Chemical Co., Ltd., 4.Itochu Plastics Inc., 5.IMaSS Nagoya Univ., 6.ILE, Osaka Univ.)

Keywords:

GaN,activation,OVPE

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