[10a-E301-1~12] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-E301-1] Low-Temperature Fabrication of Nb-Doped Anatase TiO₂ Thin Films with Low Contact Resistance by Mist Chemical Vapor Deposition

〇Tomoki Kawaguchi¹, Megumi Ariga¹, Tomohito Sudare², Yumie Miura², Ryo Nakayama², Yoshinobu Nakamura², Ryota Shimizu³, Htet Su Wai⁴, Toshiyuki Kawaharamura⁴, Taro Hitosugi², Naoomi Yamada¹ (1.Chubu Univ., 2.Univ. Tokyo, 3.IMS, 4.Kochi Univ. of Tech.)

Keywords:

Anatase TiO2,Mist-CVD,Fuel Cell