Presentation Information

[10a-E301-6]Fabrication and Evaluation of Cs-Doped Titanium Dioxide Thin-Film Transistors

〇Ryo Miyazawa1, Tsubasa Takami1, Keita Suzuki1, Masanori Miura1, Fumihiko Hirose1 (1.Yamagata Univ.)

Keywords:

Thin film transistor,Atomic layer deposition