[10a-E311-1~10] 7.2 Applications and technologies of electron beams

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-E311-7] Proposal of an electron beam size measurement sample coated with a high-density material

〇(M2)Hayata Yamamoto¹, Yasunari Sohda¹ (1.Tsukuba Univ.)

Keywords:

electron beam size,electron scattering

Silicon L/S samples for SEM electron beam size evaluation suffer from contrast degradation at high accelerating voltages. This study proposes a sample in which silicon patterns are coated with a high-density material, HfO₂, and evaluates the CNR and beam size estimates using JMONSEL simulations. The results confirm that HfO2 coating improves CNR and enhances the stability of beam size estimates against variations in tilt angle.