[10a-E311-1~10] 7.2 Applications and technologies of electron beams

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[10a-E311-9] Simulation of backscattered electron signal in gases using a scanning electron microscope

〇Taiyo Kobayashi¹, Yasuda Masaaki¹ (1.Osaka Met Univ.)

Keywords:

scanning electron microscope,backscattered electron signals,samples in gas

We're doing simulation analysis of backscattered electron signals coming from samples in gas using a scanning electron microscope. In this study, we're reporting the results of analyzing how the image signal contrast changes depending on the observation conditions. We used Monte Carlo simulations of electron scattering to analyze the electron trajectories.