[10a-F211-1~8] 13.3 Insulator technology

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[10a-F211-5] Reconsideration of stress polarity dependence in SiO₂ dielectric breakdown (II)

〇Akira Toriumi¹ (1.None)

Keywords:

SiO2,dielectric breakdown

The stress polarity dependence of SiO2 dielectric nreakdwon is reconsdered.