The 87th JSAP Autumn Meeting 2026
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Tue. Sep 8, 2026
Wed. Sep 9, 2026
Thu. Sep 10, 2026
Fri. Sep 11, 2026
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9:15 AM - 9:30 AM JST
(12:15 AM - 12:30 AM UTC)
[10a-N101-2]
Fabrication and characterization of Al
0.9
Ga
0.1
N channel HFETs via sputtering
〇Takao Kozaka
1
, Kohei Ueno
1
, Hiroshi Fujioka
1
(1.IIS, Univ. Tokyo)
Keywords:
AlN,sputter,HEMT
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