Presentation Information
[10a-N101-5]Fabrication of Thin-Film AlN/GaN HEMTs on FFA Sp-AlN
〇Mikuri Yasui1, Ryota Akaike1,2, Hiroki Yasunaga2,3, Kanako Shojiki1,2, Hideto Miyake1,2 (1.Grad. Sch. of Eng. Mie Univ., 2.IC-SDF. Mie Univ., 3.ORIP. Mie Univ.)
Keywords:
HEMT,MOVPE
