[10a-N101-1~11] 15.4 III-V-group nitride crystals

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-N101-6] Effect of sputtering conditions on N-polar AlN using the sputter-annealing method

〇Tomohiro Tamano¹, Kanako Shojiki^1,2, Ryota Akaike^1,2, Hiroki Yasunaga^2,3, Hideto Miyake^1,2 (1.Grad. Sch. of Eng. Mie Univ, 2.IC-SDF MIe Univ., 3.ORIP Mie Univ.)

Keywords:

Aluminum Nitride,Nitrogen-polarity,Sputtering