[10a-N102-1~9] KS5 Atomic Layer Process Group

10:45 AM - 11:15 AM JST(1:45 AM - 2:15 AM UTC)

[10a-N102-6] [Invited Talk] Inside High Aspect Ratio Structures in Atomic Layer Processes: Measurement-Driven Visualization of Reactive Species Transport and Reaction Depth

〇Takayoshi Tsutsumi¹ (1.Nagoya Univ.)

Keywords:

Atomic Layer Processes,Plasma,Surface Reaction