[10p-A21-1~19] 13.7 Compound and power devices, process technology and characterization

6:45 PM - 7:00 PM JST(9:45 AM - 10:00 AM UTC)

[10p-A21-19] Characterization of Interfacial Reaction and Chemical Bonding Features of AlN/GaN Stacked Structures

〇Sora Oya¹, Yuki Imai¹, Kotaro Ozaki¹, Kenji Ito², Katsunori Makihara¹ (1.Nagoya Univ. Emg., 2.Nagoya Univ. IMaSS)

Keywords:

X-ray Photoelectron Spectroscopy