Presentation Information

[10p-A23-13]Improvement of Vertical InGaAs Nanowire Yield in Selective-Area Growth on Si Using Metal/Insulator Composite Mask

〇Keita Taniyama1, Hitoshi Watanabe1, Yuki Azuma1, Katsuhiro Tomioka1 (1.GS of IST and RCIQE, Hokkaido Univ.)

Keywords:

III-V,Nanowire