Presentation Information

[10p-A33-2]Speckle Noise Reduction by Structured Light using 2D single-shot OCT

〇Kanta Sato1, Keito Fukuda1, Shuto Onodera1, Tatsutoshi Shioda1 (1.Saitama Univ.)

Keywords:

Optical Coherence Tomography,Speckle

In 2D single-shot OCT, which is effective for the high-precision in-line inspection of micro-hole structures, speckle noise that hinders image discrimination remains a challenge. In this study, we introduced a cylindrical lens array as a structured light mechanism to reduce this noise. We measured a rough surface under varying element pitches and numerical apertures (NA) and evaluated the coefficient of variation (CV). The results revealed that the CV is proportional to the square of the NA (NA2), and that a smaller NA leads to a higher noise reduction rate. Through these findings, optimal optical design guidelines were obtained.