[10p-A33-1~14] 3.7 Optical measurement, instrumentation, and sensor

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10p-A33-4] Simultaneous Measurement of Composition and Thickness Using Tomographic Spectroscopy

〇Shuto Onodera¹, Bilkis Farjana¹, Takahiro Kajiyama¹, Satoe Murazawa¹, Kanta Sato¹, Kengo Takamiya¹, Tatsutoshi Shioda¹ (1.Saitama Univ.)

Keywords:

Optical Coherence Tomography,Tomographic Spectroscopy,Complex Refractive Index

We propose a tomographic spectroscopy method for the fast and non-destructive evaluation of material properties in manufacturing quality control. This method obtains the amplitude reflectivity of each interface from the Fourier transform of the interference spectrum, and sequentially calculates the complex refractive index and thickness of each layer via the Kramers-Kronig relation. As a validation result using a three-layer model with a silicon substrate, a refractive index of 3.5, a thickness of 503 μm, and an absorption coefficient of 0.05 for the second layer were experimentally obtained, confirming the effectiveness of the proposed method including the rear air layer.