[10p-E206-1~10] 16.3 Bulk, thin-film and other silicon-based solar cells

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10p-E206-5] Characterization of ICO Thin Films Deposited by RF Magnetron Co-Sputtering

〇Yuta Shinohara¹, Ryosuke Sugaya¹, Tatsumi Nakamura¹, Hyunju Lee^2,3, Yoshio Ohshita³, Atsushi Ogura^1,2 (1.Meiji Univ., 2.MREL., 3.Toyota Tech. Inst.)

Keywords:

TCO,RF Magnetron Sputtering,SHJ Solar Cell

To achieve a carbon-neutral society, there is a growing demand for the widespread adoption of solar cells and further improvements in their power conversion efficiency. One promising approach to enhancing solar cell performance is the optimization of transparent conductive oxide (TCO)films. In recent years, ICO (CeO₂-doped In₂O₃)thin films have attracted considerable attention due to their excellent near-infrared transparency. However, the optimal Ce doping concentration has not yet been fully investigated. Therefore, in this study, ICO thin films were fabricated by RF magnetron co-sputtering with varying Ce concentrations, and their electrical and optical properties were systematically evaluated.