Presentation Information
[10p-E206-6]Effect of Film Thickness Reduction on Passivation Properties of Cat-CVD SiOxNy Films
〇Yinuo Song1, Kensaku Maeda1, Keisuke Ohdaira1 (1.JAIST)
Keywords:
Silicon oxynitride,Surface passivation,Cat-CVD
Silicon oxynitride,Surface passivation,Cat-CVD