[10p-E208-1~11] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[10p-E208-1] Optical and electrical properties of Sb-Se films deposited by sputtering

〇(M2)Shogo Watanabe¹, Tamihiro Gotoh¹ (1.Gunma Univ.)

Keywords:

Phase Change Memory

With the advancement of AI, the demand for high-performance memory is increasing. Phase-change memory is a candidate for next-generation memory, but due to challenges arising from multi-component materials, replacement with simpler binary chalcogenide materials is desirable. Therefore, we focused on Sb-Se compounds and evaluated the optical and electrical properties of sputtered and evaporated films. We observed a resistance characteristic opposite to that of typical crystallization in the temperature dependence of electrical resistivity. We will investigate the mechanism of this inverse characteristic and the influence of the film deposition method on the physical properties.