[10p-E208-1~11] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[10p-E208-2] Optical properties of Se-Te thin films deposited by evaporation and sputtering

〇(M2)Toi Otake¹, Tamihiro Gotoh¹ (1.Gunma Univ.)

Keywords:

spittering

In research on chalcogenide electric switches, elemental Se and Te, which do not contain cationic elements, have attracted attention. On the other hand, it is unclear what kind of electric switch behavior Se-Te compounds, which similarly do not contain cationic elements, exhibit. Furthermore, Se and Te electric switch devices are deposited by sputtering, and their behavior as evaporated films is not well understood. Therefore, with the aim of clarifying the influence of the film deposition method, we evaluated the basic physical properties of Se-Te thin films deposited by evaporation and sputtering.