[10p-E208-1~11] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[10p-E208-3] Optical and electrical properties of sputtered Sn-Se films

〇(M2)Kenichiro Nishida¹, Tamihiro Gotoh¹ (1.Gunma Univ.)

Keywords:

sputtering,Sn-Se,selector

One solution to the power problem in AI is the use of non-volatile, low-power phase-change memory. We focused on Sn-Se compounds, which are binary chalcogenides, and considered them as a novel phase-change memory and selector materials. We subjected Sn-Se thin films deposited by vacuum deposition and DC sputtering to heat treatment and compared their physical properties. As a result, we found that the activation energy during heating and cooling was almost equal in the thin film deposited by sputtering, and crystallization due to heat treatment was less likely to occur.