[10p-E215-1~15] CS.10 Code-sharing session of 6.5&7.5

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[10p-E215-2] Characteristics and Cut Orientation Dependence of DLC-Coated QCM Sensors for Atomic Hydrogen Detection

〇Akira Heya¹, Seita Niihara¹, Ippei Tanaka¹, Koji Sumitomo¹ (1.Univ. of Hyogo)

Keywords:

atomic hydrogen,DLC,quartz crystal microbalance

We investigated a diamond-like carbon (DLC)/quartz crystal microbalance (QCM) sensor as a simple method for measuring atomic hydrogen density. DLC did not form a modified surface layer even in atomic hydrogen and exhibited a linear frequency shift with high reproducibility. Compared with the AT-cut, the SC-cut showed smaller temperature effects and greater stability, demonstrating its effectiveness for evaluating the initial reaction process during atomic hydrogen annealing (AHA).