Presentation Information

[10p-E215-3]Evaluation of Raman Spectra of DLC Grown by PAPECVD: Dependence of CH4 Concentration

〇Satoshi Seki1, Kazuki Kanasaka1, Yulin Yan1, Yuki Okabe1, Shuichi Ogawa1 (1.Nihon Univ)

Keywords:

Photoelectron-Assisted plasma,DLC