[10p-E215-1~15] CS.10 Code-sharing session of 6.5&7.5

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10p-E215-4] Nitrogen Bonding States in Nitrogen-Doped DLC: Discharge Mode Dependence

〇Yulin Yan¹, Satoshi Seki¹, Yasutaka Tsuda², Akitaka Yoshigoe², Shuichi Ogawa¹ (1.Nihon Univ., 2.JAEA.)

Keywords:

Diamond-Like Carbon,photoemission-Assisted Plasma CVD,XPS

In this study, to clarify the chemical bonding state of nitrogen atoms in photoelectron-controlled plasma CVD, we investigated the relationship between the nitrogen atom chemical bonding state and the discharge mode in N-DLC films deposited by glow and Townsend discharge.