Presentation Information

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10p-E301-7]Comparative study of TMAl and TEAl decomposition and hydrocarbon combustion mechanisms during (Al_xGa_1-x)₂O₃growth by MOVPE

〇Yuma Terauchi¹, Shogo Sasaki², Junya Yoshinaga^1,3, Rie Togashi⁴, Makiko Furuishi⁵, Yoshihiko Takinami⁵, Masato Ishikawa⁶, Akira Kusaba⁷, Yoshinao Kumagai¹ (1.Tokyo Univ. of Agric. and Tech., 2.Kyushu Univ., 3.Nippon Sanso Corporation, 4.Sophia Univ., 5.Kanomax Analytical Inc., 6.Gas-Phase Growth Ltd., 7.RIAM, Kyushu Univ.)

Keywords:

MOVPE,(AlxGa1-x)2O3,TMAl

(Al_xGa_1-x)₂O₃のMOVPE成長のため、減圧ホットウォール反応炉からのガスサンプリング質量分析により、Al原料であるトリメチルアルミニウムおよびトリエチルアルミニウムの分解および炭化水素燃焼挙動を検討した。

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Presentation Information

[10p-E301-7]Comparative study of TMAl and TEAl decomposition and hydrocarbon combustion mechanisms during (AlxGa1-x)2O3 growth by MOVPE

Keywords:

[10p-E301-7]Comparative study of TMAl and TEAl decomposition and hydrocarbon combustion mechanisms during (Al_xGa_1-x)₂O₃growth by MOVPE