[10p-E308-1~18] 6.6 Probe Microscopy

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[10p-E308-13] AFM analysis of corrosion protection film for semiconductor’s fine wires on Cu₂O in-liquid environment

〇Kaito Hayashi¹, Daiki Oka¹, Tomoki Yokawa¹, Kazuki Miyata¹, Megumi Uno², Chikako Takatoh², Takeshi Fukuma¹ (1.Kanazawa Univ., 2.EBARA Corp.)

Keywords:

Atomic Force Microscopy