Presentation Information
[10p-PA2-1]Structural, Electrical, and Optical Properties of SnO2 Films Prepared by Reactive Sputtering Using Sn/SnO2 Mixed Target
〇(M1C)Rikuto Noai1, Junjun Jia2, Keiji Kaneyama1, Nose Shota1, Kaho Yokota1, Nobuto Oka1 (1.Kindai Univ., 2.Waseda Univ.)
Keywords:
SnO2,thin film,reactive sputtering