Presentation Information
[10p-PA2-18]Fabrication of Bi4Ti3O112 Thin Films by the Metal-Organic Decomposition Method for Functional Heterojunction Applications
〇Harutaka Sato1, Yasuyuki Yamada1 (1.NIT Oyama college)
Keywords:
Ferroelectric,Bi4Ti3O12,metal-organic decomposition method
In this study, Bi4Ti3O12 thin films were fabricated by the metal-organic decomposition method under varying heat-treatment conditions, and their crystal phases and orientation were evaluated. The results revealed that the influence of the heat-treatment atmosphere was minor, whereas the film characteristics strongly depended on the substrate type and heat-treatment temperature. For the films fabricated on SrTiO3 substrates, the highest orientation was achieved when heat-treated at 800°C. This suggests that the c-axis preferential orientation was promoted as a result of lattice matching.