[10p-PA2-1~38] 6.4 Thin films and New materials

[10p-PA2-22] Control of the Orientation of SrLiH3 Thin Films on TiHx Buffer Layers for Hydride-Ion Device Development

〇Tomoki Okuyama¹, Hiroyuki Oguchi¹, Kurumi Nagasaka³, Erika Fukushi¹, Fumiya Mori¹, Takayuki Harada² (1.Shibaura Tech., 2.NIMS, 3.Shibaura Inst.)

Keywords:

Hydride ion,thin film

In this study, SrLiH3 thin films were fabricated on TiHx buffer layers as a basic structure for hydride-ion devices. XRD analysis revealed that TiHx was dehydrogenated and transformed into a Ti layer during SrLiH3 deposition, and that the preferred orientation of SrLiH3 changed from (111) to (110) depending on the deposition temperature of TiHx.