Presentation Information
[10p-PA2-22]Control of the Orientation of SrLiH3 Thin Films on TiHx Buffer Layers for Hydride-Ion Device Development
〇Tomoki Okuyama1, Hiroyuki Oguchi1, Kurumi Nagasaka3, Erika Fukushi1, Fumiya Mori1, Takayuki Harada2 (1.Shibaura Tech., 2.NIMS, 3.Shibaura Inst.)
Keywords:
Hydride ion,thin film
In this study, SrLiH3 thin films were fabricated on TiHx buffer layers as a basic structure for hydride-ion devices. XRD analysis revealed that TiHx was dehydrogenated and transformed into a Ti layer during SrLiH3 deposition, and that the preferred orientation of SrLiH3 changed from (111) to (110) depending on the deposition temperature of TiHx.