Presentation Information
[10p-PA2-24]Fundamental Study on the Hydrogen-Sensing Properties and Concentration Detection Mechanisms of Metal Thin Films Using Electrical Resistance Measurements
〇(M1C)Shun Ando1, Ryo Harada2, Helmut Takahiro Uchida1,2 (1.Tokai Univ., 2.Technol.Tokai Univ.)
Keywords:
Palladium Thin Film,Hydrogen Sensor,Resistance Change
This study aims to establish baseline data on the initial state of Pd thin films in order to separate the effects of stress and temperature superimposed on the hydrogen concentration response. Pd thin films deposited on GaAs and Ni substrates by vacuum evaporation were evaluated in terms of film thickness, Pd(111) orientation, and electrical resistance properties, providing fundamental data for elucidating the concentration detection mechanism.